Boiko YV, Kuznetsov GV, SavitskySМ, Tretyak OV. Automated deep-level spectrometer for the study of semiconductor structures. TKEA [Internet]. 2007Jun.29 [cited 2026Mar.18];(3):59-1. Available from: http://tkea.com.ua/index.php/journal/article/view/TKEA2007.3.59