Influence of gettering on aluminum ohmic contact formation

Victor Litvinenko; Yevgen Baganov; Ivan Vikulin; Victor Gorbachev

doi:10.15222/TKEA2020.1-2.45

Victor Litvinenko Kherson National Technical University https://orcid.org/0000-0002-9425-5551
Yevgen Baganov Kherson National Technical University https://orcid.org/0000-0001-8771-5735
Ivan Vikulin O. S. Popov Odessa National Academy of Telecommunications https://orcid.org/0000-0003-3887-6676
Victor Gorbachev O. S. Popov Odessa National Academy of Telecommunications https://orcid.org/0000-0002-6668-6864

DOI: https://doi.org/10.15222/TKEA2020.1-2.45

Keywords: aluminum, ohmic contact, gettering, varicap, defects, reverse current

Abstract

The study considers the reasons and mechanisms of degradation of reverse characteristics of varicaps with aluminum-based ohmic contacts. The authors present and analyze the experimental results on how gettering affects the reverse current of varicaps, as well as possible mechanisms of such effect. Gettering was performed with a getter site created on the back side of the substrate before the epitaxial layer is deposited on the working side of the substrate. The article demonstrates that the proposed technology using gettering is rather effective in reducing the level of reverse currents and in increasing the yield of devices.

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