[1]
Hladkovskiy, V.V., Kostin, E.G., Polozov, B.P., Fedorovich, O.A. and Petriakov, V.A. 2014. The influence of if discharge parameters and heater settings on the substrate temperature in the plasma-chemical reactor «almaz» for the synthesis of diamond-like carbon films. Technology and design in electronic equipment. 5–6 (Dec. 2014), 39-45. DOI:https://doi.org/10.15222/TKEA2014.5-6.39.