Belyanin, A. F., Samoylovich, M. I., Kovalskiy, K. A. and Petukhov, K. Y. (2005) “Fabrication of nanostructured AlN and ZnO films and their application in electronic engineering”, Technology and design in electronic equipment, (4), pp. 46-54. Available at: https://tkea.com.ua/index.php/journal/article/view/TKEA2005.4.46 (Accessed: 13May2026).