Hladkovskiy, V. V., Kostin, E. G., Polozov, B. P., Fedorovich, O. A. and Petriakov, V. A. (2014) “The influence of if discharge parameters and heater settings on the substrate temperature in the plasma-chemical reactor «almaz» for the synthesis of diamond-like carbon films”, Technology and design in electronic equipment, (5–6), pp. 39-45. doi: 10.15222/TKEA2014.5-6.39.