Makara, V. A., Odarych, V. A., Kepich, T. Y., Preobragenskaya, T. D. and Rudenko, O. V. (2009) “Apparatus and methods for measuring of the film structures homogeneity degree”, Technology and design in electronic equipment, (3), pp. 40-46. Available at: https://tkea.com.ua/index.php/journal/article/view/TKEA2009.3.40 (Accessed: 12December2025).