Kostin, E. G. and Demchyshyn, A. V. (2008) “Deposition of TiN and TiO₂ films in an inverted cylindrical magnetron by reactive sputtering”, Technology and design in electronic equipment, (4), pp. 47-51. Available at: https://tkea.com.ua/index.php/journal/article/view/TKEA2008.4.47 (Accessed: 12January2026).