Ivanchikov AE, Kisel AM, Medvedeva AB, Plebanovich VI, Ponomar VN, Shikulo VE. Methods of removing polymer contamination caused by plasma-chemical etching. TKEA [Internet]. 2003Oct.31 [cited 2026May23];(5):46-0. Available from: https://tkea.com.ua/index.php/journal/article/view/TKEA2003.5.46