UDC 621.793 The equipment for ohmic contacts formation in semi-conductor devices based on À3Â5 connections Aleksandrov S. B., Krupal¢nik K. M., Kornilov N. O., Kondratyeva T. O. Keywords: semiconductor devices, ohmic contacts, electron-beam evaporation. Technological process features of ohmic contacts formation in semi-conductor devices based on À3Â5 connections and the general principles of technological modules construction are considered. The results received by means of installations of an electron-beam evaporation of STE EB series and installations of fast thermal annealing of STE RTA series are shown. Russia, S.-Petersburg, CC «Scientific and Technological Equipment». |