An improved method for detection of “hot spots” in microelectronic devices

  • V. M. Popov Institute of Microdevices of NAS of Ukraine, Kyiv, Ukraine
  • A. S. Klimenko Institute of Microdevices of NAS of Ukraine, Kyiv, Ukraine
  • A. P. Pokanevich Institute of Microdevices of NAS of Ukraine, Kyiv, Ukraine
Keywords: “hot spots”, visualization, defects, nematic and cholesteric liquid crystals, liquid crystal phases, integrated circuits

Abstract

A new method of liquid‑crystal thermography for detecting “hot spots” in microelectronic device crystals has been developed. The method is based on the visual display of a “hot spot” by the local cholesteric phase within the transparent smectic phase of a cholesteric liquid crystal, against the clear background of the topological elements of the device crystal surface. Examples of “hot spot” visualization on samples of crystals of various types of integrated circuits are presented.

Published
2008-06-30
How to Cite
Popov, V. M., Klimenko, A. S., & Pokanevich, A. P. (2008). An improved method for detection of “hot spots” in microelectronic devices. Technology and Design in Electronic Equipment, (3), 55-58. Retrieved from https://tkea.com.ua/index.php/journal/article/view/TKEA2008.3.55