Study of glow discharge parameters in a coaxial electrode system with a thin cathode

Olga Andriienko

doi:10.15222/TKEA2024.3-4.24

Olga Andriienko Igor Sikorsky Kyiv Polytechnic Institute

DOI: https://doi.org/10.15222/TKEA2024.3-4.24

Keywords: glow discharge, diffusion models, plasma modeling, coaxial system, electrode, thin cathode

Abstract

Various gas discharges are the basis of many electronic, photonic devices and ion-plasma technologies. Among them, the glow discharge is the most common and is often mentioned in the scientific and technical literature. In this study, we model a glow discharge in a cylindrical coaxial system with dielectric electrode ends in the hydrodynamic drift-diffusion approximation. The model parameters are: anode diameter 10 mm, cathode diameter 30 µm, voltage 800 V, temperature of the working argon gas 300 K, pd ≈ 2 Pa∙m (p — working gas pressure, d — distance between electrodes), which corresponds to the right side of the minimum area of the Paschen curve for discharge ignition. The reactions of ionization of atoms by electron impact, generation and quenching of metastable atoms, elastic collision of electrons with atoms and elastic collision of ions, resonant recharge of ions, Penning ionization, and secondary ion-electron emission of the cathode are taken into account. The potential distribution and concentration of charged particles in the interelectrode space are calculated within the framework of a self-consistent problem, and the electron current density, concentration of charged particles, and potential along the cathode are presented. The effect of the ballast resistor R_b of the blocking capacity on the parameters and discharge mode is determined. The obtained results can be used in plasma technologies to modify the internal surfaces of metal, hollow, long parts with a small cross-sectional size.

References

Surzhikov S. T. Theoretical and Computational Physics of Gas Discharge Phenomena: A Mathematical Introduction, Berlin/Boston: Walter de Gruyter GmbH, 2020, 549 p.

Fridman A., Kennedy L. A. Plasma Physics and Engineering. Boca Raton: CRC Press, 2021, 724 p. https://doi.org/10.1201/9781315120812

Lisovskiy V. A., Yakovin S. D. experimental study of a low-pressure glow discharge in air in large diameter discharge tubes Plasma Physics Reports. 2000, vol. 26, no. 12, pр. 1066–1075. https://doi.org/10.1134/1.1331142

Hou L., Wang Y., Wang J. et al. Theoretical study on characteristics of glow discharged neon gas and its interaction with terahertz waves, Front. Phys., 2021, vol. 9, 751335. https://doi.org/10.3389/fphy.2021.751335

Almeida P. G. C., Benilov M. S., Faria M. J. Study of stability of dc glow discharges with the use of comsol multiphysics software. Journal of Physics: Applied Physics, 2011, vol. 44, no. 41, 415203. https://doi.org/10.1088/0022-3727/44/41/415203

Bouchikhi A., Hamid A. 2D DC subnormal glow discharge in argon. Plasma Science and Technology, 2010, vol. 12, no. 1, pp. 59–66. https://doi.org/10.1088/1009-0630/12/1/13

Phadke P., Sturm J. M., van der Kruijs R. W. E., Bijkerk F. Sputtering and nitridation of transition metal surface under low energy, steady state nitrogen ion bombardmentю Appl. Surf. Sci., 2020, vol. 505, 144529. https://doi.org/10.1016/j.apsusc.2019.144529

Kuzmichev A., Perevertaylo V., Tsybulsky L., Volpian O. Characteristics of flows of energetic atoms reflected from metal target during ion bombardment. J. Phys.: Conf. Ser. 2016, vol. 729, 012005. https://doi.org/10.1088/1742-6596/729/1/012005

Rafatov I., Islamov G., Eylenceoglu E. et al. Analysis of different modeling approaches for simulation of glow discharge in helium at atmospheric pressure. Phys. Plasmas, 2023, vol. 30, iss. 9, art. 093504. https://doi.org/10.1063/5.0161535

Rafatov I., Bogdanov E. A., Kudryavtsev A. A. On the accuracy and reliability of different fluid models of the direct current glow discharge. Phys. Plasmas, 2012, vol. 19, iss. 3, 033502. https://doi.org/10.1063/1.3688875

Xiao-Qiong Wen, Li-Yong Yin, De-Zhen Wang. A direct current glow discharge plasma source for inner surface modification of metallic tubeю Nuclear Instruments and Methods in Physics. Research Section B: Beam Interactions with Materials and Atoms, 2007, vol. 263, iss. 2, pp. 535–537. https://doi.org/10.1016/j.nimb.2007.07.020

Šijačić D. D., Ebert U., Rafatov I. Period doubling cascade in glow discharges: Local versus global differential conductivity. Physical Review E, 2004, no. 70, 056220. https://doi.org/10.1103/PhysRevE.70.056220

Bogaerts A., Wilken L., Hoffmann V. et al. Comparison of modeling calculations with experimental results for rf glow discharge optical emission spectrometry. Spectrochimica Acta Part B: Atomic Spectroscopy, 2002, vol. 57, iss. 1, pp. 109–119. https://doi.org/10.1016/S0584-8547(01)00357-3