Equipment for probe diagnostics and control of plasma technological processes

  • S. V. Dudin National Science Center «Kharkiv Institute of Physics and Technology», NAS of Ukraine, Ukraine
  • A. P. Yatskov National Science Center «Kharkiv Institute of Physics and Technology», NAS of Ukraine, Ukraine
  • V. I. Farenik National Science Center «Kharkiv Institute of Physics and Technology», NAS of Ukraine, Ukraine
Keywords: plasma diagnostics, probe control, plasma processing, etching curves, universal instrument, technological plasma

Abstract

A review of methods and devices for probe control of plasma technological processes is carried out. A series of "Kontrol" ("Control") instruments using specially developed schemes for the compensation and processing of the probe signal, as well as original algorithms for the analysis of etching curves, is described. A universal instrument "Plazmometr" ("Plasmometer"), designed for the automated determination of key parameters of laboratory and technological plasma, is also described.
Published
2002-06-30
How to Cite
Dudin, S. V., Yatskov, A. P., & Farenik, V. I. (2002). Equipment for probe diagnostics and control of plasma technological processes. Technology and Design in Electronic Equipment, (3), 43-50. Retrieved from https://tkea.com.ua/index.php/journal/article/view/TKEA2002.3.43
Issue
No. 3 (2002): Tekhnologiya i konstruirovanie v elektronnoi apparature
Section
Articles

Copyright (c) 2002 Dudin S. V., Yatskov A. P., Farenik V. I.

Creative Commons License

This work is licensed under a Creative Commons Attribution 4.0 International License.