Осаждение пленок борофосфоросиликатного стекла с использованием системы ТЭОС – диметилфосфит – триметилборат
Анотація
Проведена модернизация горизонтального реактора пониженного давления. Разработана система подачи жидкого реагента с использованием барботеров. Исследованы процессы осаждения пленок и свойства пленок фосфосиликатного и борофосфосиликатного стекла с использованием системы ТЭОС – диметилфосфит (ДМФ) – триметилборат (ТМФ).
Посилання
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