One of the degradation mechanisms of microelectromechanical structures of pressure sensors

  • S. A. Adarchyn OJSC "Avtoelektronika", Kaluga, Russia
  • A. S. Kuzhnenkov OJSC "Avtoelektronika", Kaluga, Russia
  • L. V. Kozhitov Kaluga Branch of Bauman Moscow State Technical University, Russia
  • V. G. Kosushkin National University of Science and Technology "MISIS", Moscow, Russia
Keywords: pressure sensors, microelectromechanical structures, degradation mechanism, temperature hysteresis, failure occurrence, mathematical model, reliability

Abstract

A mechanism for the degradation and occurrence of failures in microelectromechanical structures of pressure sensors is established. A mathematical model for the change in the temperature hysteresis value of the sensor output signal is proposed, and the degree of its impact on the reliability of the devices is determined. Methods to reduce the magnitude and decrease the growth rate of the output signal hysteresis in microelectromechanical structures are proposed.

Published
2002-04-30
How to Cite
Adarchyn, S. A., Kuzhnenkov, A. S., Kozhitov, L. V., & Kosushkin, V. G. (2002). One of the degradation mechanisms of microelectromechanical structures of pressure sensors. Technology and Design in Electronic Equipment, (2), 55-57. Retrieved from https://tkea.com.ua/index.php/journal/article/view/TKEA2002.2.55
Issue
No. 2 (2002): Tekhnologiya i konstruirovanie v elektronnoi apparature
Section
Articles

Copyright (c) 2002 Adarchyn S. A., Kuzhnenkov A. S., Kozhitov L. V., Kosushkin V. G.

Creative Commons License

This work is licensed under a Creative Commons Attribution 4.0 International License.